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assembly was a critical development in the MEMS eld Fan, Tai, and Muller at the University of California Berkeley Sensor and Actuator Center rst accomplished it using a sacri cial layer-based surface micromachining process in 1986 in their efforts to make a rotary electrostatic micromotor A group at the Massachusetts Institute of Technology also accomplished this at the same time using very similar design and processing techniques The schematic of this joint is shown in Fig 154 A oating (as opposed to being xed to the substrate) in-plane joint is also possible The in-plane revolute joints are useful for mounting cams to the substrate or to a moving member 1552 Out-of-Plane Revolute Joints Microfabricating an out-of-plane revolute joint was another important milestone K Pister of Berkeley Sensor and Actuator Center accomplished this by cleverly using a sacri cial layer in the surface micromachining process The schematics of substrate and oating joints are shown in Fig 155 These joints can be used in conjunction with cams to achieve out-of-plane mechanical movement 1553 Linkages A number of micromachined in-plane and out-of-plane linkages consisting of revolute joints and sliders have been demonstrated One practical application used these in conjunction with gears and some cams to create micromechanical locks Another application is integrated optics-on-a-chip wherein light beams can be manipulated and modulated using movable mechanical structures A few speci c linkages and mechanisms are described in Sec 156 1554 Gears Several micromachining processes can be used to make gears and racks in assembled or nonassembled form from the micron scale up to the millimeter scale A proper involute pro le for gear teeth is possible in photolithography masks, and deep etching techniques give reasonably smooth vertical surfaces for teeth This means that cams also can be made easily using micromachining processes However, cams are not yet used in MEMS in the traditional way but alternate manifestations of cams do exist These are discussed in Sec 156.

16:

Part III:

statement sequence // #endif Here s an example:

// Demonstrate #elif #define RELEASE using System; class Test { static void Main() { #if EXPERIMENTAL ConsoleWriteLine("Compiled for experimental version"); #elif RELEASE ConsoleWriteLine("Compiled for release"); #else ConsoleWriteLine("Compiled for internal testing"); #endif #if TRIAL && !RELEASE ConsoleWriteLine("Trial version"); #endif ConsoleWriteLine("This is in all versions"); } }

(b) FIGURE 155 Solid models of out-of-plane surface micromachined substrate and oating revolute joints (a) as fabricated (b) after movement

The query panel has its own buttons that allow you to modify the way the SQL is generated Table 20-2 provides an overview of each of these buttons The buttons in Table 20-2 are specific to when you are modifying the query and not formatting the report Table 20-3 shows the top row of buttons in the Java Report panel that you use while building a query This row of buttons appears when you are editing either the query (Edit Query) or the formatted report (Edit Report) However, some will be grayed out, depending on which panel is active From the query panel, you build or modify your query definitions You run the query to retrieve the results and display in a formatted document

The output is shown here:

The #undef directive removes a previously defined symbol That is, it undefines a symbol The general form for #undef is #undef symbol Here s an example:

1555 Compliant Mechanisms At the microscale, an alternative to rigid-body jointed mechanisms is a compliant mechanism that relies on elastic deformation of a structural continuum Figure 153 illustrates an example As shown in this gure, assembly is not required to make compliant mechanisms and therefore they are well suited for MEMS applications In fact, compliant structures such as beams and membranes are ubiquitously found in existing MEMS devices More sophisticated mechanical motion is also possible with compliant mechanisms Applications of this at the microscale are emerging in microoptomechanical

20:

After the #undef directive, SMALL is no longer defined #undef is used principally to allow symbols to be localized to only those sections of code that need them

Part I:

Purpose By default, the classes and objects are displayed If you have a large query with many result columns, you may want to momentarily hide the classes and objects to see more result objects A toggle that hides the Query Filters pane to allow you to display more result objects Modify the query to retrieve more levels of details in the microcube but display only summary levels in the initial report Scope of analysis is discussed in 19 Insert a new query as another data provider for this document A quick filter allows you to add a filter on the currently selected result object and presents you with a list of values The object is then added in the Query Filters pane Create a query within a query In Desktop Intelligence, this is done by setting a condition equal to another query Add a database ranking, different from a ranking within a report Create queries that are combined with the SQL operators UNION, INTERSECT, and MINUS These are discussed in 23 Launch the SQL Viewer, allowing you to view, copy, or modify the SQL query

systems, microsurgery, microassembly, and micromanipulation of small objects such as single biological cells, to name a few

The #error directive forces the compiler to stop compilation It is used for debugging The general form of the #error directive is #error error-message When the #error directive is encountered, the error message is displayed For example, when the compiler encounters this line:

#error This is a test error!

query This is particularly true for complex queries or queries that you know may be better run scheduled rather than in real time To do so, click Edit Report to go to the formatted report view and then select Save